10/16/2010	2:31:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/16/2010	2:31:13 PM	Recipe started at 2:31 PM
10/16/2010	2:31:13 PM	H2 valve closed
10/16/2010	2:31:13 PM	BCl3 valve closed
10/16/2010	2:31:13 PM	PH3 valve closed
10/16/2010	2:31:13 PM	SiCl4 pre valve closed
10/16/2010	2:31:13 PM	SiCl4 post valve closed
10/16/2010	2:31:13 PM	Main Vac valve closed
10/16/2010	2:31:13 PM	Bypass valve closed
10/16/2010	2:31:13 PM	Bubbler valve closed
10/16/2010	2:31:13 PM	Helium valve opened
10/16/2010	2:31:13 PM	Helium MFC set to  500.000000
10/16/2010	2:31:13 PM	H2 MFC set to  0.000000
10/16/2010	2:31:13 PM	BCl3 MFC set to  0.000000
10/16/2010	2:31:13 PM	PHl3 MFC set to  0.000000
10/16/2010	2:31:13 PM	SiCl4 MFC set to  0.000000
10/16/2010	2:31:13 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	2:31:13 PM	Tube furnace set to 0
10/16/2010	2:32:33 PM	Helium valve closed
10/16/2010	2:32:33 PM	H2 valve closed
10/16/2010	2:32:33 PM	BCl3 valve closed
10/16/2010	2:32:33 PM	PH3 valve closed
10/16/2010	2:32:33 PM	SiCl4 pre valve closed
10/16/2010	2:32:33 PM	SiCl4 post valve closed
10/16/2010	2:32:33 PM	Main Vac valve closed
10/16/2010	2:32:33 PM	Bypass valve closed
10/16/2010	2:32:33 PM	Bubbler valve closed
10/16/2010	2:32:33 PM	Helium MFC set to  0.000000
10/16/2010	2:32:33 PM	H2 MFC set to  0.000000
10/16/2010	2:32:33 PM	BCl3 MFC set to  0.000000
10/16/2010	2:32:33 PM	PHl3 MFC set to  0.000000
10/16/2010	2:32:33 PM	SiCl4 MFC set to  0.000000
10/16/2010	2:32:33 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	2:32:33 PM	Tube furnace set to 0
10/16/2010	2:32:34 PM	Run finished at 2:32 PM
10/16/2010	2:32:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/16/2010	2:39:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/16/2010	2:39:55 PM	Recipe started at 2:39 PM
10/16/2010	2:39:55 PM	Helium valve closed
10/16/2010	2:39:55 PM	H2 valve closed
10/16/2010	2:39:55 PM	BCl3 valve closed
10/16/2010	2:39:55 PM	PH3 valve closed
10/16/2010	2:39:55 PM	SiCl4 pre valve closed
10/16/2010	2:39:55 PM	SiCl4 post valve closed
10/16/2010	2:39:55 PM	Main Vac valve closed
10/16/2010	2:39:55 PM	Bubbler valve closed
10/16/2010	2:39:55 PM	Bypass valve opened
10/16/2010	2:39:55 PM	Helium MFC set to  0.000000
10/16/2010	2:39:55 PM	H2 MFC set to  0.000000
10/16/2010	2:39:55 PM	BCl3 MFC set to  0.000000
10/16/2010	2:39:55 PM	PHl3 MFC set to  0.000000
10/16/2010	2:39:55 PM	SiCl4 MFC set to  0.000000
10/16/2010	2:39:55 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	2:39:55 PM	Tube furnace set to 0
10/16/2010	2:40:42 PM	Helium valve closed
10/16/2010	2:40:42 PM	H2 valve closed
10/16/2010	2:40:42 PM	BCl3 valve closed
10/16/2010	2:40:42 PM	PH3 valve closed
10/16/2010	2:40:42 PM	SiCl4 pre valve closed
10/16/2010	2:40:42 PM	SiCl4 post valve closed
10/16/2010	2:40:42 PM	Bubbler valve closed
10/16/2010	2:40:42 PM	Main Vac valve opened
10/16/2010	2:40:42 PM	Bypass valve opened
10/16/2010	2:40:42 PM	Helium MFC set to  0.000000
10/16/2010	2:40:42 PM	H2 MFC set to  0.000000
10/16/2010	2:40:42 PM	BCl3 MFC set to  0.000000
10/16/2010	2:40:42 PM	PHl3 MFC set to  0.000000
10/16/2010	2:40:42 PM	SiCl4 MFC set to  0.000000
10/16/2010	2:40:42 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	2:40:42 PM	Tube furnace set to 0
10/16/2010	2:40:43 PM	Run finished at 2:40 PM
10/16/2010	2:40:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/16/2010	2:41:47 PM	Tube furnace set to 80
10/16/2010	2:43:53 PM	Bypass valve closed
10/16/2010	2:43:55 PM	Main Vac valve closed
10/16/2010	2:44:17 PM	Main Vac valve opened
10/16/2010	2:44:18 PM	Bypass valve opened
10/16/2010	3:06:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/16/2010	3:06:31 PM	Recipe started at 3:06 PM
10/16/2010	3:06:31 PM	Helium valve closed
10/16/2010	3:06:31 PM	H2 valve closed
10/16/2010	3:06:31 PM	BCl3 valve closed
10/16/2010	3:06:31 PM	PH3 valve closed
10/16/2010	3:06:31 PM	SiCl4 pre valve closed
10/16/2010	3:06:32 PM	SiCl4 post valve closed
10/16/2010	3:06:32 PM	Main Vac valve closed
10/16/2010	3:06:32 PM	Bubbler valve closed
10/16/2010	3:06:32 PM	Bypass valve opened
10/16/2010	3:06:32 PM	Helium MFC set to  0.000000
10/16/2010	3:06:32 PM	H2 MFC set to  0.000000
10/16/2010	3:06:32 PM	BCl3 MFC set to  0.000000
10/16/2010	3:06:32 PM	PHl3 MFC set to  0.000000
10/16/2010	3:06:32 PM	SiCl4 MFC set to  0.000000
10/16/2010	3:06:32 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	3:06:32 PM	Tube furnace set to 0
10/16/2010	3:06:32 PM	Helium valve closed
10/16/2010	3:06:32 PM	H2 valve closed
10/16/2010	3:06:32 PM	BCl3 valve closed
10/16/2010	3:06:32 PM	PH3 valve closed
10/16/2010	3:06:32 PM	SiCl4 pre valve closed
10/16/2010	3:06:32 PM	SiCl4 post valve closed
10/16/2010	3:06:32 PM	Bubbler valve closed
10/16/2010	3:06:32 PM	Main Vac valve opened
10/16/2010	3:06:32 PM	Bypass valve opened
10/16/2010	3:06:32 PM	Helium MFC set to  0.000000
10/16/2010	3:06:32 PM	H2 MFC set to  0.000000
10/16/2010	3:06:32 PM	BCl3 MFC set to  0.000000
10/16/2010	3:06:32 PM	PHl3 MFC set to  0.000000
10/16/2010	3:06:32 PM	SiCl4 MFC set to  0.000000
10/16/2010	3:06:32 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	3:06:32 PM	Tube furnace set to 0
10/16/2010	3:07:32 PM	H2 valve closed
10/16/2010	3:07:32 PM	BCl3 valve closed
10/16/2010	3:07:32 PM	PH3 valve closed
10/16/2010	3:07:32 PM	SiCl4 pre valve closed
10/16/2010	3:07:32 PM	SiCl4 post valve closed
10/16/2010	3:07:32 PM	Bubbler valve closed
10/16/2010	3:07:32 PM	Helium valve opened
10/16/2010	3:07:32 PM	Main Vac valve opened
10/16/2010	3:07:32 PM	Bypass valve opened
10/16/2010	3:07:32 PM	Helium MFC set to  100.000000
10/16/2010	3:07:32 PM	H2 MFC set to  0.000000
10/16/2010	3:07:32 PM	BCl3 MFC set to  0.000000
10/16/2010	3:07:32 PM	PHl3 MFC set to  0.000000
10/16/2010	3:07:32 PM	SiCl4 MFC set to  0.000000
10/16/2010	3:07:32 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	3:07:32 PM	Tube furnace set to 0
10/16/2010	3:08:32 PM	Helium valve closed
10/16/2010	3:08:32 PM	H2 valve closed
10/16/2010	3:08:32 PM	BCl3 valve closed
10/16/2010	3:08:32 PM	PH3 valve closed
10/16/2010	3:08:32 PM	SiCl4 pre valve closed
10/16/2010	3:08:32 PM	SiCl4 post valve closed
10/16/2010	3:08:32 PM	Bubbler valve closed
10/16/2010	3:08:32 PM	Main Vac valve opened
10/16/2010	3:08:32 PM	Bypass valve opened
10/16/2010	3:08:32 PM	Helium MFC set to  0.000000
10/16/2010	3:08:32 PM	H2 MFC set to  0.000000
10/16/2010	3:08:32 PM	BCl3 MFC set to  0.000000
10/16/2010	3:08:32 PM	PHl3 MFC set to  0.000000
10/16/2010	3:08:32 PM	SiCl4 MFC set to  0.000000
10/16/2010	3:08:32 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	3:08:33 PM	Tube furnace set to 0
10/16/2010	3:09:33 PM	H2 valve closed
10/16/2010	3:09:33 PM	BCl3 valve closed
10/16/2010	3:09:33 PM	PH3 valve closed
10/16/2010	3:09:33 PM	SiCl4 pre valve closed
10/16/2010	3:09:33 PM	SiCl4 post valve closed
10/16/2010	3:09:33 PM	Bubbler valve closed
10/16/2010	3:09:33 PM	Helium valve opened
10/16/2010	3:09:33 PM	Main Vac valve opened
10/16/2010	3:09:33 PM	Bypass valve opened
10/16/2010	3:09:33 PM	Helium MFC set to  100.000000
10/16/2010	3:09:33 PM	H2 MFC set to  0.000000
10/16/2010	3:09:33 PM	BCl3 MFC set to  0.000000
10/16/2010	3:09:33 PM	PHl3 MFC set to  0.000000
10/16/2010	3:09:33 PM	SiCl4 MFC set to  0.000000
10/16/2010	3:09:33 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	3:09:33 PM	Tube furnace set to 0
10/16/2010	3:10:33 PM	Helium valve closed
10/16/2010	3:10:33 PM	H2 valve closed
10/16/2010	3:10:33 PM	BCl3 valve closed
10/16/2010	3:10:33 PM	PH3 valve closed
10/16/2010	3:10:33 PM	SiCl4 pre valve closed
10/16/2010	3:10:33 PM	SiCl4 post valve closed
10/16/2010	3:10:33 PM	Bubbler valve closed
10/16/2010	3:10:33 PM	Main Vac valve opened
10/16/2010	3:10:33 PM	Bypass valve opened
10/16/2010	3:10:33 PM	Helium MFC set to  0.000000
10/16/2010	3:10:33 PM	H2 MFC set to  0.000000
10/16/2010	3:10:33 PM	BCl3 MFC set to  0.000000
10/16/2010	3:10:33 PM	PHl3 MFC set to  0.000000
10/16/2010	3:10:33 PM	SiCl4 MFC set to  0.000000
10/16/2010	3:10:33 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	3:10:33 PM	Tube furnace set to 0
10/16/2010	3:11:33 PM	H2 valve closed
10/16/2010	3:11:33 PM	BCl3 valve closed
10/16/2010	3:11:33 PM	PH3 valve closed
10/16/2010	3:11:33 PM	SiCl4 pre valve closed
10/16/2010	3:11:33 PM	SiCl4 post valve closed
10/16/2010	3:11:33 PM	Bubbler valve closed
10/16/2010	3:11:33 PM	Helium valve opened
10/16/2010	3:11:33 PM	Main Vac valve opened
10/16/2010	3:11:33 PM	Bypass valve opened
10/16/2010	3:11:33 PM	Helium MFC set to  100.000000
10/16/2010	3:11:33 PM	H2 MFC set to  0.000000
10/16/2010	3:11:33 PM	BCl3 MFC set to  0.000000
10/16/2010	3:11:33 PM	PHl3 MFC set to  0.000000
10/16/2010	3:11:33 PM	SiCl4 MFC set to  0.000000
10/16/2010	3:11:33 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	3:11:33 PM	Tube furnace set to 0
10/16/2010	3:12:33 PM	Helium valve closed
10/16/2010	3:12:33 PM	H2 valve closed
10/16/2010	3:12:33 PM	BCl3 valve closed
10/16/2010	3:12:33 PM	PH3 valve closed
10/16/2010	3:12:33 PM	SiCl4 pre valve closed
10/16/2010	3:12:33 PM	SiCl4 post valve closed
10/16/2010	3:12:33 PM	Bubbler valve closed
10/16/2010	3:12:33 PM	Main Vac valve opened
10/16/2010	3:12:33 PM	Bypass valve opened
10/16/2010	3:12:33 PM	Helium MFC set to  0.000000
10/16/2010	3:12:33 PM	H2 MFC set to  0.000000
10/16/2010	3:12:33 PM	BCl3 MFC set to  0.000000
10/16/2010	3:12:33 PM	PHl3 MFC set to  0.000000
10/16/2010	3:12:33 PM	SiCl4 MFC set to  0.000000
10/16/2010	3:12:33 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	3:12:33 PM	Tube furnace set to 0
10/16/2010	3:13:33 PM	H2 valve closed
10/16/2010	3:13:33 PM	BCl3 valve closed
10/16/2010	3:13:33 PM	PH3 valve closed
10/16/2010	3:13:33 PM	SiCl4 pre valve closed
10/16/2010	3:13:33 PM	SiCl4 post valve closed
10/16/2010	3:13:33 PM	Bubbler valve closed
10/16/2010	3:13:33 PM	Helium valve opened
10/16/2010	3:13:33 PM	Main Vac valve opened
10/16/2010	3:13:33 PM	Bypass valve opened
10/16/2010	3:13:33 PM	Helium MFC set to  100.000000
10/16/2010	3:13:33 PM	H2 MFC set to  0.000000
10/16/2010	3:13:33 PM	BCl3 MFC set to  0.000000
10/16/2010	3:13:33 PM	PHl3 MFC set to  0.000000
10/16/2010	3:13:33 PM	SiCl4 MFC set to  0.000000
10/16/2010	3:13:33 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	3:13:33 PM	Tube furnace set to 0
10/16/2010	3:14:34 PM	Helium valve closed
10/16/2010	3:14:34 PM	H2 valve closed
10/16/2010	3:14:34 PM	BCl3 valve closed
10/16/2010	3:14:34 PM	PH3 valve closed
10/16/2010	3:14:34 PM	SiCl4 pre valve closed
10/16/2010	3:14:34 PM	SiCl4 post valve closed
10/16/2010	3:14:34 PM	Bubbler valve closed
10/16/2010	3:14:34 PM	Main Vac valve opened
10/16/2010	3:14:34 PM	Bypass valve opened
10/16/2010	3:14:34 PM	Helium MFC set to  0.000000
10/16/2010	3:14:34 PM	H2 MFC set to  0.000000
10/16/2010	3:14:34 PM	BCl3 MFC set to  0.000000
10/16/2010	3:14:34 PM	PHl3 MFC set to  0.000000
10/16/2010	3:14:34 PM	SiCl4 MFC set to  0.000000
10/16/2010	3:14:34 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	3:14:34 PM	Tube furnace set to 0
10/16/2010	3:15:34 PM	H2 valve closed
10/16/2010	3:15:34 PM	BCl3 valve closed
10/16/2010	3:15:34 PM	PH3 valve closed
10/16/2010	3:15:34 PM	SiCl4 pre valve closed
10/16/2010	3:15:34 PM	SiCl4 post valve closed
10/16/2010	3:15:34 PM	Bubbler valve closed
10/16/2010	3:15:34 PM	Helium valve opened
10/16/2010	3:15:34 PM	Main Vac valve opened
10/16/2010	3:15:34 PM	Bypass valve opened
10/16/2010	3:15:34 PM	Helium MFC set to  100.000000
10/16/2010	3:15:34 PM	H2 MFC set to  0.000000
10/16/2010	3:15:34 PM	BCl3 MFC set to  0.000000
10/16/2010	3:15:34 PM	PHl3 MFC set to  0.000000
10/16/2010	3:15:34 PM	SiCl4 MFC set to  0.000000
10/16/2010	3:15:34 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	3:15:34 PM	Tube furnace set to 0
10/16/2010	3:16:34 PM	Helium valve closed
10/16/2010	3:16:34 PM	H2 valve closed
10/16/2010	3:16:34 PM	BCl3 valve closed
10/16/2010	3:16:34 PM	PH3 valve closed
10/16/2010	3:16:34 PM	SiCl4 pre valve closed
10/16/2010	3:16:34 PM	SiCl4 post valve closed
10/16/2010	3:16:34 PM	Bubbler valve closed
10/16/2010	3:16:34 PM	Main Vac valve opened
10/16/2010	3:16:34 PM	Bypass valve opened
10/16/2010	3:16:34 PM	Helium MFC set to  0.000000
10/16/2010	3:16:34 PM	H2 MFC set to  0.000000
10/16/2010	3:16:34 PM	BCl3 MFC set to  0.000000
10/16/2010	3:16:34 PM	PHl3 MFC set to  0.000000
10/16/2010	3:16:34 PM	SiCl4 MFC set to  0.000000
10/16/2010	3:16:34 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	3:16:34 PM	Tube furnace set to 0
10/16/2010	3:17:34 PM	H2 valve closed
10/16/2010	3:17:34 PM	BCl3 valve closed
10/16/2010	3:17:34 PM	PH3 valve closed
10/16/2010	3:17:34 PM	SiCl4 pre valve closed
10/16/2010	3:17:34 PM	SiCl4 post valve closed
10/16/2010	3:17:34 PM	Bubbler valve closed
10/16/2010	3:17:34 PM	Helium valve opened
10/16/2010	3:17:34 PM	Main Vac valve opened
10/16/2010	3:17:34 PM	Bypass valve opened
10/16/2010	3:17:34 PM	Helium MFC set to  100.000000
10/16/2010	3:17:34 PM	H2 MFC set to  0.000000
10/16/2010	3:17:34 PM	BCl3 MFC set to  0.000000
10/16/2010	3:17:34 PM	PHl3 MFC set to  0.000000
10/16/2010	3:17:34 PM	SiCl4 MFC set to  0.000000
10/16/2010	3:17:34 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	3:17:34 PM	Tube furnace set to 0
10/16/2010	3:18:34 PM	Helium valve closed
10/16/2010	3:18:34 PM	H2 valve closed
10/16/2010	3:18:34 PM	BCl3 valve closed
10/16/2010	3:18:34 PM	PH3 valve closed
10/16/2010	3:18:34 PM	SiCl4 pre valve closed
10/16/2010	3:18:34 PM	SiCl4 post valve closed
10/16/2010	3:18:34 PM	Bubbler valve closed
10/16/2010	3:18:34 PM	Main Vac valve opened
10/16/2010	3:18:34 PM	Bypass valve opened
10/16/2010	3:18:34 PM	Helium MFC set to  0.000000
10/16/2010	3:18:34 PM	H2 MFC set to  0.000000
10/16/2010	3:18:34 PM	BCl3 MFC set to  0.000000
10/16/2010	3:18:34 PM	PHl3 MFC set to  0.000000
10/16/2010	3:18:34 PM	SiCl4 MFC set to  0.000000
10/16/2010	3:18:34 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	3:18:34 PM	Tube furnace set to 0
10/16/2010	3:19:35 PM	H2 valve closed
10/16/2010	3:19:35 PM	BCl3 valve closed
10/16/2010	3:19:35 PM	PH3 valve closed
10/16/2010	3:19:35 PM	SiCl4 pre valve closed
10/16/2010	3:19:35 PM	SiCl4 post valve closed
10/16/2010	3:19:35 PM	Bubbler valve closed
10/16/2010	3:19:35 PM	Helium valve opened
10/16/2010	3:19:35 PM	Main Vac valve opened
10/16/2010	3:19:35 PM	Bypass valve opened
10/16/2010	3:19:35 PM	Helium MFC set to  100.000000
10/16/2010	3:19:35 PM	H2 MFC set to  0.000000
10/16/2010	3:19:35 PM	BCl3 MFC set to  0.000000
10/16/2010	3:19:35 PM	PHl3 MFC set to  0.000000
10/16/2010	3:19:35 PM	SiCl4 MFC set to  0.000000
10/16/2010	3:19:35 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	3:19:35 PM	Tube furnace set to 0
10/16/2010	3:20:35 PM	Helium valve closed
10/16/2010	3:20:35 PM	H2 valve closed
10/16/2010	3:20:35 PM	BCl3 valve closed
10/16/2010	3:20:35 PM	PH3 valve closed
10/16/2010	3:20:35 PM	SiCl4 pre valve closed
10/16/2010	3:20:35 PM	SiCl4 post valve closed
10/16/2010	3:20:35 PM	Bubbler valve closed
10/16/2010	3:20:35 PM	Main Vac valve opened
10/16/2010	3:20:35 PM	Bypass valve opened
10/16/2010	3:20:35 PM	Helium MFC set to  0.000000
10/16/2010	3:20:35 PM	H2 MFC set to  0.000000
10/16/2010	3:20:35 PM	BCl3 MFC set to  0.000000
10/16/2010	3:20:35 PM	PHl3 MFC set to  0.000000
10/16/2010	3:20:35 PM	SiCl4 MFC set to  0.000000
10/16/2010	3:20:35 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	3:20:35 PM	Tube furnace set to 0
10/16/2010	3:21:35 PM	H2 valve closed
10/16/2010	3:21:35 PM	BCl3 valve closed
10/16/2010	3:21:35 PM	PH3 valve closed
10/16/2010	3:21:35 PM	SiCl4 pre valve closed
10/16/2010	3:21:35 PM	SiCl4 post valve closed
10/16/2010	3:21:35 PM	Bubbler valve closed
10/16/2010	3:21:35 PM	Helium valve opened
10/16/2010	3:21:35 PM	Main Vac valve opened
10/16/2010	3:21:35 PM	Bypass valve opened
10/16/2010	3:21:35 PM	Helium MFC set to  100.000000
10/16/2010	3:21:35 PM	H2 MFC set to  0.000000
10/16/2010	3:21:35 PM	BCl3 MFC set to  0.000000
10/16/2010	3:21:35 PM	PHl3 MFC set to  0.000000
10/16/2010	3:21:35 PM	SiCl4 MFC set to  0.000000
10/16/2010	3:21:35 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	3:21:35 PM	Tube furnace set to 0
10/16/2010	3:22:35 PM	Helium valve closed
10/16/2010	3:22:35 PM	H2 valve closed
10/16/2010	3:22:35 PM	BCl3 valve closed
10/16/2010	3:22:35 PM	PH3 valve closed
10/16/2010	3:22:35 PM	SiCl4 pre valve closed
10/16/2010	3:22:35 PM	SiCl4 post valve closed
10/16/2010	3:22:35 PM	Bubbler valve closed
10/16/2010	3:22:35 PM	Main Vac valve opened
10/16/2010	3:22:35 PM	Bypass valve opened
10/16/2010	3:22:35 PM	Helium MFC set to  0.000000
10/16/2010	3:22:35 PM	H2 MFC set to  0.000000
10/16/2010	3:22:35 PM	BCl3 MFC set to  0.000000
10/16/2010	3:22:35 PM	PHl3 MFC set to  0.000000
10/16/2010	3:22:35 PM	SiCl4 MFC set to  0.000000
10/16/2010	3:22:35 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	3:22:35 PM	Tube furnace set to 0
10/16/2010	3:23:35 PM	H2 valve closed
10/16/2010	3:23:35 PM	BCl3 valve closed
10/16/2010	3:23:35 PM	PH3 valve closed
10/16/2010	3:23:35 PM	SiCl4 pre valve closed
10/16/2010	3:23:35 PM	SiCl4 post valve closed
10/16/2010	3:23:35 PM	Bubbler valve closed
10/16/2010	3:23:35 PM	Helium valve opened
10/16/2010	3:23:35 PM	Main Vac valve opened
10/16/2010	3:23:35 PM	Bypass valve opened
10/16/2010	3:23:35 PM	Helium MFC set to  100.000000
10/16/2010	3:23:35 PM	H2 MFC set to  0.000000
10/16/2010	3:23:35 PM	BCl3 MFC set to  0.000000
10/16/2010	3:23:35 PM	PHl3 MFC set to  0.000000
10/16/2010	3:23:35 PM	SiCl4 MFC set to  0.000000
10/16/2010	3:23:35 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	3:23:35 PM	Tube furnace set to 0
10/16/2010	3:24:35 PM	Helium valve closed
10/16/2010	3:24:35 PM	H2 valve closed
10/16/2010	3:24:35 PM	BCl3 valve closed
10/16/2010	3:24:35 PM	PH3 valve closed
10/16/2010	3:24:35 PM	SiCl4 pre valve closed
10/16/2010	3:24:35 PM	SiCl4 post valve closed
10/16/2010	3:24:35 PM	Bubbler valve closed
10/16/2010	3:24:36 PM	Main Vac valve opened
10/16/2010	3:24:36 PM	Bypass valve opened
10/16/2010	3:24:36 PM	Helium MFC set to  0.000000
10/16/2010	3:24:36 PM	H2 MFC set to  0.000000
10/16/2010	3:24:36 PM	BCl3 MFC set to  0.000000
10/16/2010	3:24:36 PM	PHl3 MFC set to  0.000000
10/16/2010	3:24:36 PM	SiCl4 MFC set to  0.000000
10/16/2010	3:24:36 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	3:24:36 PM	Tube furnace set to 0
10/16/2010	3:25:36 PM	H2 valve closed
10/16/2010	3:25:36 PM	BCl3 valve closed
10/16/2010	3:25:36 PM	PH3 valve closed
10/16/2010	3:25:36 PM	SiCl4 pre valve closed
10/16/2010	3:25:36 PM	SiCl4 post valve closed
10/16/2010	3:25:36 PM	Bubbler valve closed
10/16/2010	3:25:36 PM	Helium valve opened
10/16/2010	3:25:36 PM	Main Vac valve opened
10/16/2010	3:25:36 PM	Bypass valve opened
10/16/2010	3:25:36 PM	Helium MFC set to  100.000000
10/16/2010	3:25:36 PM	H2 MFC set to  0.000000
10/16/2010	3:25:36 PM	BCl3 MFC set to  0.000000
10/16/2010	3:25:36 PM	PHl3 MFC set to  0.000000
10/16/2010	3:25:36 PM	SiCl4 MFC set to  0.000000
10/16/2010	3:25:36 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	3:25:36 PM	Tube furnace set to 0
10/16/2010	3:26:36 PM	Helium valve closed
10/16/2010	3:26:36 PM	H2 valve closed
10/16/2010	3:26:36 PM	BCl3 valve closed
10/16/2010	3:26:36 PM	PH3 valve closed
10/16/2010	3:26:36 PM	SiCl4 pre valve closed
10/16/2010	3:26:36 PM	SiCl4 post valve closed
10/16/2010	3:26:36 PM	Bubbler valve closed
10/16/2010	3:26:36 PM	Main Vac valve opened
10/16/2010	3:26:36 PM	Bypass valve opened
10/16/2010	3:26:36 PM	Helium MFC set to  0.000000
10/16/2010	3:26:36 PM	H2 MFC set to  0.000000
10/16/2010	3:26:36 PM	BCl3 MFC set to  0.000000
10/16/2010	3:26:36 PM	PHl3 MFC set to  0.000000
10/16/2010	3:26:36 PM	SiCl4 MFC set to  0.000000
10/16/2010	3:26:36 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	3:26:36 PM	Tube furnace set to 0
10/16/2010	3:26:37 PM	Run finished at 3:26 PM
10/16/2010	3:26:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/16/2010	3:29:08 PM	Recipe started at 3:29 PM
10/16/2010	3:29:08 PM	Helium valve closed
10/16/2010	3:29:08 PM	BCl3 valve closed
10/16/2010	3:29:08 PM	PH3 valve closed
10/16/2010	3:29:08 PM	SiCl4 pre valve closed
10/16/2010	3:29:08 PM	SiCl4 post valve closed
10/16/2010	3:29:08 PM	Main Vac valve closed
10/16/2010	3:29:08 PM	Bypass valve closed
10/16/2010	3:29:08 PM	Bubbler valve closed
10/16/2010	3:29:08 PM	H2 valve opened
10/16/2010	3:29:08 PM	Helium MFC set to  0.000000
10/16/2010	3:29:08 PM	H2 MFC set to  500.000000
10/16/2010	3:29:08 PM	BCl3 MFC set to  0.000000
10/16/2010	3:29:08 PM	PHl3 MFC set to  0.000000
10/16/2010	3:29:08 PM	SiCl4 MFC set to  0.000000
10/16/2010	3:29:08 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	3:29:08 PM	Tube furnace set to 0
10/16/2010	3:30:28 PM	Helium valve closed
10/16/2010	3:30:28 PM	BCl3 valve closed
10/16/2010	3:30:28 PM	PH3 valve closed
10/16/2010	3:30:29 PM	SiCl4 pre valve closed
10/16/2010	3:30:29 PM	SiCl4 post valve closed
10/16/2010	3:30:29 PM	Main Vac valve closed
10/16/2010	3:30:29 PM	Bypass valve closed
10/16/2010	3:30:29 PM	H2 valve opened
10/16/2010	3:30:29 PM	Bubbler valve opened
10/16/2010	3:30:29 PM	Helium MFC set to  0.000000
10/16/2010	3:30:29 PM	H2 MFC set to  500.000000
10/16/2010	3:30:29 PM	BCl3 MFC set to  0.000000
10/16/2010	3:30:29 PM	PHl3 MFC set to  0.000000
10/16/2010	3:30:29 PM	SiCl4 MFC set to  0.000000
10/16/2010	3:30:29 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	3:30:29 PM	Tube furnace set to 1000
10/16/2010	3:50:29 PM	Helium valve closed
10/16/2010	3:50:29 PM	BCl3 valve closed
10/16/2010	3:50:29 PM	Main Vac valve closed
10/16/2010	3:50:29 PM	Bypass valve closed
10/16/2010	3:50:29 PM	H2 valve opened
10/16/2010	3:50:29 PM	PH3 valve opened
10/16/2010	3:50:29 PM	SiCl4 pre valve opened
10/16/2010	3:50:29 PM	SiCl4 post valve opened
10/16/2010	3:50:29 PM	Bubbler valve opened
10/16/2010	3:50:29 PM	Helium MFC set to  0.000000
10/16/2010	3:50:29 PM	H2 MFC set to  500.000000
10/16/2010	3:50:29 PM	BCl3 MFC set to  0.000000
10/16/2010	3:50:29 PM	PHl3 MFC set to  0.600000
10/16/2010	3:50:29 PM	SiCl4 MFC set to  50.000000
10/16/2010	3:50:29 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	3:50:29 PM	Tube furnace set to 1000
10/16/2010	4:05:29 PM	H2 valve closed
10/16/2010	4:05:29 PM	BCl3 valve closed
10/16/2010	4:05:29 PM	PH3 valve closed
10/16/2010	4:05:29 PM	SiCl4 pre valve closed
10/16/2010	4:05:29 PM	SiCl4 post valve closed
10/16/2010	4:05:29 PM	Main Vac valve closed
10/16/2010	4:05:29 PM	Bypass valve closed
10/16/2010	4:05:29 PM	Helium valve opened
10/16/2010	4:05:29 PM	Bubbler valve opened
10/16/2010	4:05:29 PM	Helium MFC set to  500.000000
10/16/2010	4:05:29 PM	H2 MFC set to  0.000000
10/16/2010	4:05:29 PM	BCl3 MFC set to  0.000000
10/16/2010	4:05:29 PM	PHl3 MFC set to  0.000000
10/16/2010	4:05:29 PM	SiCl4 MFC set to  0.000000
10/16/2010	4:05:29 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	4:05:29 PM	Tube furnace set to 0
10/16/2010	4:25:29 PM	Helium valve closed
10/16/2010	4:25:29 PM	H2 valve closed
10/16/2010	4:25:29 PM	BCl3 valve closed
10/16/2010	4:25:29 PM	PH3 valve closed
10/16/2010	4:25:29 PM	SiCl4 pre valve closed
10/16/2010	4:25:29 PM	SiCl4 post valve closed
10/16/2010	4:25:29 PM	Main Vac valve closed
10/16/2010	4:25:29 PM	Bypass valve closed
10/16/2010	4:25:29 PM	Bubbler valve closed
10/16/2010	4:25:29 PM	Helium MFC set to  0.000000
10/16/2010	4:25:29 PM	H2 MFC set to  0.000000
10/16/2010	4:25:29 PM	BCl3 MFC set to  0.000000
10/16/2010	4:25:29 PM	PHl3 MFC set to  0.000000
10/16/2010	4:25:29 PM	SiCl4 MFC set to  0.000000
10/16/2010	4:25:29 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	4:25:29 PM	Tube furnace set to 0
10/16/2010	4:25:29 PM	Run finished at 4:25 PM
10/16/2010	4:31:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/16/2010	4:31:38 PM	Recipe started at 4:31 PM
10/16/2010	4:31:38 PM	Helium valve closed
10/16/2010	4:31:38 PM	H2 valve closed
10/16/2010	4:31:38 PM	BCl3 valve closed
10/16/2010	4:31:38 PM	PH3 valve closed
10/16/2010	4:31:38 PM	SiCl4 pre valve closed
10/16/2010	4:31:38 PM	SiCl4 post valve closed
10/16/2010	4:31:38 PM	Main Vac valve closed
10/16/2010	4:31:38 PM	Bubbler valve closed
10/16/2010	4:31:38 PM	Bypass valve opened
10/16/2010	4:31:38 PM	Helium MFC set to  0.000000
10/16/2010	4:31:38 PM	H2 MFC set to  0.000000
10/16/2010	4:31:38 PM	BCl3 MFC set to  0.000000
10/16/2010	4:31:38 PM	PHl3 MFC set to  0.000000
10/16/2010	4:31:38 PM	SiCl4 MFC set to  0.000000
10/16/2010	4:31:38 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	4:31:39 PM	Tube furnace set to 0
10/16/2010	4:32:29 PM	Helium valve closed
10/16/2010	4:32:29 PM	H2 valve closed
10/16/2010	4:32:29 PM	BCl3 valve closed
10/16/2010	4:32:29 PM	PH3 valve closed
10/16/2010	4:32:29 PM	SiCl4 pre valve closed
10/16/2010	4:32:29 PM	SiCl4 post valve closed
10/16/2010	4:32:29 PM	Bubbler valve closed
10/16/2010	4:32:29 PM	Main Vac valve opened
10/16/2010	4:32:29 PM	Bypass valve opened
10/16/2010	4:32:29 PM	Helium MFC set to  0.000000
10/16/2010	4:32:29 PM	H2 MFC set to  0.000000
10/16/2010	4:32:29 PM	BCl3 MFC set to  0.000000
10/16/2010	4:32:29 PM	PHl3 MFC set to  0.000000
10/16/2010	4:32:29 PM	SiCl4 MFC set to  0.000000
10/16/2010	4:32:29 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	4:32:29 PM	Tube furnace set to 0
10/16/2010	4:32:30 PM	Run finished at 4:32 PM
10/16/2010	4:32:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/16/2010	4:33:48 PM	Bypass valve closed
10/16/2010	4:33:50 PM	Main Vac valve closed
10/16/2010	4:34:02 PM	Main Vac valve opened
10/16/2010	4:34:03 PM	Bypass valve opened
10/16/2010	4:34:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/16/2010	4:34:21 PM	Recipe started at 4:34 PM
10/16/2010	4:34:21 PM	Helium valve closed
10/16/2010	4:34:21 PM	H2 valve closed
10/16/2010	4:34:21 PM	BCl3 valve closed
10/16/2010	4:34:21 PM	PH3 valve closed
10/16/2010	4:34:21 PM	SiCl4 pre valve closed
10/16/2010	4:34:21 PM	SiCl4 post valve closed
10/16/2010	4:34:21 PM	Main Vac valve closed
10/16/2010	4:34:21 PM	Bubbler valve closed
10/16/2010	4:34:21 PM	Bypass valve opened
10/16/2010	4:34:21 PM	Helium MFC set to  0.000000
10/16/2010	4:34:21 PM	H2 MFC set to  0.000000
10/16/2010	4:34:21 PM	BCl3 MFC set to  0.000000
10/16/2010	4:34:21 PM	PHl3 MFC set to  0.000000
10/16/2010	4:34:21 PM	SiCl4 MFC set to  0.000000
10/16/2010	4:34:21 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	4:34:21 PM	Tube furnace set to 0
10/16/2010	4:34:21 PM	Helium valve closed
10/16/2010	4:34:21 PM	H2 valve closed
10/16/2010	4:34:21 PM	BCl3 valve closed
10/16/2010	4:34:21 PM	PH3 valve closed
10/16/2010	4:34:21 PM	SiCl4 pre valve closed
10/16/2010	4:34:21 PM	SiCl4 post valve closed
10/16/2010	4:34:21 PM	Bubbler valve closed
10/16/2010	4:34:21 PM	Main Vac valve opened
10/16/2010	4:34:21 PM	Bypass valve opened
10/16/2010	4:34:21 PM	Helium MFC set to  0.000000
10/16/2010	4:34:21 PM	H2 MFC set to  0.000000
10/16/2010	4:34:21 PM	BCl3 MFC set to  0.000000
10/16/2010	4:34:21 PM	PHl3 MFC set to  0.000000
10/16/2010	4:34:21 PM	SiCl4 MFC set to  0.000000
10/16/2010	4:34:21 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	4:34:21 PM	Tube furnace set to 0
10/16/2010	4:35:21 PM	H2 valve closed
10/16/2010	4:35:21 PM	BCl3 valve closed
10/16/2010	4:35:21 PM	PH3 valve closed
10/16/2010	4:35:21 PM	SiCl4 pre valve closed
10/16/2010	4:35:21 PM	SiCl4 post valve closed
10/16/2010	4:35:21 PM	Bubbler valve closed
10/16/2010	4:35:21 PM	Helium valve opened
10/16/2010	4:35:21 PM	Main Vac valve opened
10/16/2010	4:35:21 PM	Bypass valve opened
10/16/2010	4:35:21 PM	Helium MFC set to  100.000000
10/16/2010	4:35:21 PM	H2 MFC set to  0.000000
10/16/2010	4:35:21 PM	BCl3 MFC set to  0.000000
10/16/2010	4:35:21 PM	PHl3 MFC set to  0.000000
10/16/2010	4:35:21 PM	SiCl4 MFC set to  0.000000
10/16/2010	4:35:21 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	4:35:21 PM	Tube furnace set to 0
10/16/2010	4:36:21 PM	Helium valve closed
10/16/2010	4:36:21 PM	H2 valve closed
10/16/2010	4:36:21 PM	BCl3 valve closed
10/16/2010	4:36:21 PM	PH3 valve closed
10/16/2010	4:36:21 PM	SiCl4 pre valve closed
10/16/2010	4:36:21 PM	SiCl4 post valve closed
10/16/2010	4:36:21 PM	Bubbler valve closed
10/16/2010	4:36:21 PM	Main Vac valve opened
10/16/2010	4:36:21 PM	Bypass valve opened
10/16/2010	4:36:22 PM	Helium MFC set to  0.000000
10/16/2010	4:36:22 PM	H2 MFC set to  0.000000
10/16/2010	4:36:22 PM	BCl3 MFC set to  0.000000
10/16/2010	4:36:22 PM	PHl3 MFC set to  0.000000
10/16/2010	4:36:22 PM	SiCl4 MFC set to  0.000000
10/16/2010	4:36:22 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	4:36:22 PM	Tube furnace set to 0
10/16/2010	4:37:22 PM	H2 valve closed
10/16/2010	4:37:22 PM	BCl3 valve closed
10/16/2010	4:37:22 PM	PH3 valve closed
10/16/2010	4:37:22 PM	SiCl4 pre valve closed
10/16/2010	4:37:22 PM	SiCl4 post valve closed
10/16/2010	4:37:22 PM	Bubbler valve closed
10/16/2010	4:37:22 PM	Helium valve opened
10/16/2010	4:37:22 PM	Main Vac valve opened
10/16/2010	4:37:22 PM	Bypass valve opened
10/16/2010	4:37:22 PM	Helium MFC set to  100.000000
10/16/2010	4:37:22 PM	H2 MFC set to  0.000000
10/16/2010	4:37:22 PM	BCl3 MFC set to  0.000000
10/16/2010	4:37:22 PM	PHl3 MFC set to  0.000000
10/16/2010	4:37:22 PM	SiCl4 MFC set to  0.000000
10/16/2010	4:37:22 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	4:37:22 PM	Tube furnace set to 0
10/16/2010	4:38:22 PM	Helium valve closed
10/16/2010	4:38:22 PM	H2 valve closed
10/16/2010	4:38:22 PM	BCl3 valve closed
10/16/2010	4:38:22 PM	PH3 valve closed
10/16/2010	4:38:22 PM	SiCl4 pre valve closed
10/16/2010	4:38:22 PM	SiCl4 post valve closed
10/16/2010	4:38:22 PM	Bubbler valve closed
10/16/2010	4:38:22 PM	Main Vac valve opened
10/16/2010	4:38:22 PM	Bypass valve opened
10/16/2010	4:38:22 PM	Helium MFC set to  0.000000
10/16/2010	4:38:22 PM	H2 MFC set to  0.000000
10/16/2010	4:38:22 PM	BCl3 MFC set to  0.000000
10/16/2010	4:38:22 PM	PHl3 MFC set to  0.000000
10/16/2010	4:38:22 PM	SiCl4 MFC set to  0.000000
10/16/2010	4:38:22 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	4:38:22 PM	Tube furnace set to 0
10/16/2010	4:39:22 PM	H2 valve closed
10/16/2010	4:39:22 PM	BCl3 valve closed
10/16/2010	4:39:22 PM	PH3 valve closed
10/16/2010	4:39:22 PM	SiCl4 pre valve closed
10/16/2010	4:39:22 PM	SiCl4 post valve closed
10/16/2010	4:39:22 PM	Bubbler valve closed
10/16/2010	4:39:22 PM	Helium valve opened
10/16/2010	4:39:22 PM	Main Vac valve opened
10/16/2010	4:39:22 PM	Bypass valve opened
10/16/2010	4:39:22 PM	Helium MFC set to  100.000000
10/16/2010	4:39:22 PM	H2 MFC set to  0.000000
10/16/2010	4:39:22 PM	BCl3 MFC set to  0.000000
10/16/2010	4:39:22 PM	PHl3 MFC set to  0.000000
10/16/2010	4:39:22 PM	SiCl4 MFC set to  0.000000
10/16/2010	4:39:22 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	4:39:22 PM	Tube furnace set to 0
10/16/2010	4:40:22 PM	Helium valve closed
10/16/2010	4:40:22 PM	H2 valve closed
10/16/2010	4:40:22 PM	BCl3 valve closed
10/16/2010	4:40:22 PM	PH3 valve closed
10/16/2010	4:40:22 PM	SiCl4 pre valve closed
10/16/2010	4:40:22 PM	SiCl4 post valve closed
10/16/2010	4:40:22 PM	Bubbler valve closed
10/16/2010	4:40:22 PM	Main Vac valve opened
10/16/2010	4:40:22 PM	Bypass valve opened
10/16/2010	4:40:22 PM	Helium MFC set to  0.000000
10/16/2010	4:40:22 PM	H2 MFC set to  0.000000
10/16/2010	4:40:22 PM	BCl3 MFC set to  0.000000
10/16/2010	4:40:22 PM	PHl3 MFC set to  0.000000
10/16/2010	4:40:22 PM	SiCl4 MFC set to  0.000000
10/16/2010	4:40:22 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	4:40:22 PM	Tube furnace set to 0
10/16/2010	4:41:22 PM	H2 valve closed
10/16/2010	4:41:22 PM	BCl3 valve closed
10/16/2010	4:41:22 PM	PH3 valve closed
10/16/2010	4:41:22 PM	SiCl4 pre valve closed
10/16/2010	4:41:22 PM	SiCl4 post valve closed
10/16/2010	4:41:22 PM	Bubbler valve closed
10/16/2010	4:41:22 PM	Helium valve opened
10/16/2010	4:41:22 PM	Main Vac valve opened
10/16/2010	4:41:22 PM	Bypass valve opened
10/16/2010	4:41:22 PM	Helium MFC set to  100.000000
10/16/2010	4:41:22 PM	H2 MFC set to  0.000000
10/16/2010	4:41:22 PM	BCl3 MFC set to  0.000000
10/16/2010	4:41:22 PM	PHl3 MFC set to  0.000000
10/16/2010	4:41:22 PM	SiCl4 MFC set to  0.000000
10/16/2010	4:41:22 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	4:41:23 PM	Tube furnace set to 0
10/16/2010	4:42:23 PM	Helium valve closed
10/16/2010	4:42:23 PM	H2 valve closed
10/16/2010	4:42:23 PM	BCl3 valve closed
10/16/2010	4:42:23 PM	PH3 valve closed
10/16/2010	4:42:23 PM	SiCl4 pre valve closed
10/16/2010	4:42:23 PM	SiCl4 post valve closed
10/16/2010	4:42:23 PM	Bubbler valve closed
10/16/2010	4:42:23 PM	Main Vac valve opened
10/16/2010	4:42:23 PM	Bypass valve opened
10/16/2010	4:42:23 PM	Helium MFC set to  0.000000
10/16/2010	4:42:23 PM	H2 MFC set to  0.000000
10/16/2010	4:42:23 PM	BCl3 MFC set to  0.000000
10/16/2010	4:42:23 PM	PHl3 MFC set to  0.000000
10/16/2010	4:42:23 PM	SiCl4 MFC set to  0.000000
10/16/2010	4:42:23 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	4:42:23 PM	Tube furnace set to 0
10/16/2010	4:43:23 PM	H2 valve closed
10/16/2010	4:43:23 PM	BCl3 valve closed
10/16/2010	4:43:23 PM	PH3 valve closed
10/16/2010	4:43:23 PM	SiCl4 pre valve closed
10/16/2010	4:43:23 PM	SiCl4 post valve closed
10/16/2010	4:43:23 PM	Bubbler valve closed
10/16/2010	4:43:23 PM	Helium valve opened
10/16/2010	4:43:23 PM	Main Vac valve opened
10/16/2010	4:43:23 PM	Bypass valve opened
10/16/2010	4:43:23 PM	Helium MFC set to  100.000000
10/16/2010	4:43:23 PM	H2 MFC set to  0.000000
10/16/2010	4:43:23 PM	BCl3 MFC set to  0.000000
10/16/2010	4:43:23 PM	PHl3 MFC set to  0.000000
10/16/2010	4:43:23 PM	SiCl4 MFC set to  0.000000
10/16/2010	4:43:23 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	4:43:23 PM	Tube furnace set to 0
10/16/2010	4:44:23 PM	Helium valve closed
10/16/2010	4:44:23 PM	H2 valve closed
10/16/2010	4:44:23 PM	BCl3 valve closed
10/16/2010	4:44:23 PM	PH3 valve closed
10/16/2010	4:44:23 PM	SiCl4 pre valve closed
10/16/2010	4:44:23 PM	SiCl4 post valve closed
10/16/2010	4:44:23 PM	Bubbler valve closed
10/16/2010	4:44:23 PM	Main Vac valve opened
10/16/2010	4:44:23 PM	Bypass valve opened
10/16/2010	4:44:23 PM	Helium MFC set to  0.000000
10/16/2010	4:44:23 PM	H2 MFC set to  0.000000
10/16/2010	4:44:23 PM	BCl3 MFC set to  0.000000
10/16/2010	4:44:23 PM	PHl3 MFC set to  0.000000
10/16/2010	4:44:23 PM	SiCl4 MFC set to  0.000000
10/16/2010	4:44:23 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	4:44:23 PM	Tube furnace set to 0
10/16/2010	4:45:23 PM	H2 valve closed
10/16/2010	4:45:23 PM	BCl3 valve closed
10/16/2010	4:45:23 PM	PH3 valve closed
10/16/2010	4:45:23 PM	SiCl4 pre valve closed
10/16/2010	4:45:23 PM	SiCl4 post valve closed
10/16/2010	4:45:23 PM	Bubbler valve closed
10/16/2010	4:45:23 PM	Helium valve opened
10/16/2010	4:45:23 PM	Main Vac valve opened
10/16/2010	4:45:23 PM	Bypass valve opened
10/16/2010	4:45:23 PM	Helium MFC set to  100.000000
10/16/2010	4:45:23 PM	H2 MFC set to  0.000000
10/16/2010	4:45:23 PM	BCl3 MFC set to  0.000000
10/16/2010	4:45:23 PM	PHl3 MFC set to  0.000000
10/16/2010	4:45:23 PM	SiCl4 MFC set to  0.000000
10/16/2010	4:45:23 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	4:45:23 PM	Tube furnace set to 0
10/16/2010	4:46:23 PM	Helium valve closed
10/16/2010	4:46:23 PM	H2 valve closed
10/16/2010	4:46:23 PM	BCl3 valve closed
10/16/2010	4:46:23 PM	PH3 valve closed
10/16/2010	4:46:23 PM	SiCl4 pre valve closed
10/16/2010	4:46:23 PM	SiCl4 post valve closed
10/16/2010	4:46:23 PM	Bubbler valve closed
10/16/2010	4:46:23 PM	Main Vac valve opened
10/16/2010	4:46:23 PM	Bypass valve opened
10/16/2010	4:46:23 PM	Helium MFC set to  0.000000
10/16/2010	4:46:23 PM	H2 MFC set to  0.000000
10/16/2010	4:46:23 PM	BCl3 MFC set to  0.000000
10/16/2010	4:46:23 PM	PHl3 MFC set to  0.000000
10/16/2010	4:46:23 PM	SiCl4 MFC set to  0.000000
10/16/2010	4:46:23 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	4:46:24 PM	Tube furnace set to 0
10/16/2010	4:47:24 PM	H2 valve closed
10/16/2010	4:47:24 PM	BCl3 valve closed
10/16/2010	4:47:24 PM	PH3 valve closed
10/16/2010	4:47:24 PM	SiCl4 pre valve closed
10/16/2010	4:47:24 PM	SiCl4 post valve closed
10/16/2010	4:47:24 PM	Bubbler valve closed
10/16/2010	4:47:24 PM	Helium valve opened
10/16/2010	4:47:24 PM	Main Vac valve opened
10/16/2010	4:47:24 PM	Bypass valve opened
10/16/2010	4:47:24 PM	Helium MFC set to  100.000000
10/16/2010	4:47:24 PM	H2 MFC set to  0.000000
10/16/2010	4:47:24 PM	BCl3 MFC set to  0.000000
10/16/2010	4:47:24 PM	PHl3 MFC set to  0.000000
10/16/2010	4:47:24 PM	SiCl4 MFC set to  0.000000
10/16/2010	4:47:24 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	4:47:24 PM	Tube furnace set to 0
10/16/2010	4:48:24 PM	Helium valve closed
10/16/2010	4:48:24 PM	H2 valve closed
10/16/2010	4:48:24 PM	BCl3 valve closed
10/16/2010	4:48:24 PM	PH3 valve closed
10/16/2010	4:48:24 PM	SiCl4 pre valve closed
10/16/2010	4:48:24 PM	SiCl4 post valve closed
10/16/2010	4:48:24 PM	Bubbler valve closed
10/16/2010	4:48:24 PM	Main Vac valve opened
10/16/2010	4:48:24 PM	Bypass valve opened
10/16/2010	4:48:24 PM	Helium MFC set to  0.000000
10/16/2010	4:48:24 PM	H2 MFC set to  0.000000
10/16/2010	4:48:24 PM	BCl3 MFC set to  0.000000
10/16/2010	4:48:24 PM	PHl3 MFC set to  0.000000
10/16/2010	4:48:24 PM	SiCl4 MFC set to  0.000000
10/16/2010	4:48:24 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	4:48:24 PM	Tube furnace set to 0
10/16/2010	4:49:24 PM	H2 valve closed
10/16/2010	4:49:24 PM	BCl3 valve closed
10/16/2010	4:49:24 PM	PH3 valve closed
10/16/2010	4:49:24 PM	SiCl4 pre valve closed
10/16/2010	4:49:24 PM	SiCl4 post valve closed
10/16/2010	4:49:24 PM	Bubbler valve closed
10/16/2010	4:49:24 PM	Helium valve opened
10/16/2010	4:49:24 PM	Main Vac valve opened
10/16/2010	4:49:24 PM	Bypass valve opened
10/16/2010	4:49:24 PM	Helium MFC set to  100.000000
10/16/2010	4:49:24 PM	H2 MFC set to  0.000000
10/16/2010	4:49:24 PM	BCl3 MFC set to  0.000000
10/16/2010	4:49:24 PM	PHl3 MFC set to  0.000000
10/16/2010	4:49:24 PM	SiCl4 MFC set to  0.000000
10/16/2010	4:49:24 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	4:49:24 PM	Tube furnace set to 0
10/16/2010	4:50:24 PM	Helium valve closed
10/16/2010	4:50:24 PM	H2 valve closed
10/16/2010	4:50:24 PM	BCl3 valve closed
10/16/2010	4:50:24 PM	PH3 valve closed
10/16/2010	4:50:24 PM	SiCl4 pre valve closed
10/16/2010	4:50:24 PM	SiCl4 post valve closed
10/16/2010	4:50:24 PM	Bubbler valve closed
10/16/2010	4:50:24 PM	Main Vac valve opened
10/16/2010	4:50:24 PM	Bypass valve opened
10/16/2010	4:50:24 PM	Helium MFC set to  0.000000
10/16/2010	4:50:24 PM	H2 MFC set to  0.000000
10/16/2010	4:50:24 PM	BCl3 MFC set to  0.000000
10/16/2010	4:50:24 PM	PHl3 MFC set to  0.000000
10/16/2010	4:50:24 PM	SiCl4 MFC set to  0.000000
10/16/2010	4:50:24 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	4:50:24 PM	Tube furnace set to 0
10/16/2010	4:51:24 PM	H2 valve closed
10/16/2010	4:51:24 PM	BCl3 valve closed
10/16/2010	4:51:24 PM	PH3 valve closed
10/16/2010	4:51:24 PM	SiCl4 pre valve closed
10/16/2010	4:51:24 PM	SiCl4 post valve closed
10/16/2010	4:51:24 PM	Bubbler valve closed
10/16/2010	4:51:24 PM	Helium valve opened
10/16/2010	4:51:24 PM	Main Vac valve opened
10/16/2010	4:51:24 PM	Bypass valve opened
10/16/2010	4:51:24 PM	Helium MFC set to  100.000000
10/16/2010	4:51:24 PM	H2 MFC set to  0.000000
10/16/2010	4:51:24 PM	BCl3 MFC set to  0.000000
10/16/2010	4:51:24 PM	PHl3 MFC set to  0.000000
10/16/2010	4:51:24 PM	SiCl4 MFC set to  0.000000
10/16/2010	4:51:24 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	4:51:25 PM	Tube furnace set to 0
10/16/2010	4:52:25 PM	Helium valve closed
10/16/2010	4:52:25 PM	H2 valve closed
10/16/2010	4:52:25 PM	BCl3 valve closed
10/16/2010	4:52:25 PM	PH3 valve closed
10/16/2010	4:52:25 PM	SiCl4 pre valve closed
10/16/2010	4:52:25 PM	SiCl4 post valve closed
10/16/2010	4:52:25 PM	Bubbler valve closed
10/16/2010	4:52:25 PM	Main Vac valve opened
10/16/2010	4:52:25 PM	Bypass valve opened
10/16/2010	4:52:25 PM	Helium MFC set to  0.000000
10/16/2010	4:52:25 PM	H2 MFC set to  0.000000
10/16/2010	4:52:25 PM	BCl3 MFC set to  0.000000
10/16/2010	4:52:25 PM	PHl3 MFC set to  0.000000
10/16/2010	4:52:25 PM	SiCl4 MFC set to  0.000000
10/16/2010	4:52:25 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	4:52:25 PM	Tube furnace set to 0
10/16/2010	4:53:25 PM	H2 valve closed
10/16/2010	4:53:25 PM	BCl3 valve closed
10/16/2010	4:53:25 PM	PH3 valve closed
10/16/2010	4:53:25 PM	SiCl4 pre valve closed
10/16/2010	4:53:25 PM	SiCl4 post valve closed
10/16/2010	4:53:25 PM	Bubbler valve closed
10/16/2010	4:53:25 PM	Helium valve opened
10/16/2010	4:53:25 PM	Main Vac valve opened
10/16/2010	4:53:25 PM	Bypass valve opened
10/16/2010	4:53:25 PM	Helium MFC set to  100.000000
10/16/2010	4:53:25 PM	H2 MFC set to  0.000000
10/16/2010	4:53:25 PM	BCl3 MFC set to  0.000000
10/16/2010	4:53:25 PM	PHl3 MFC set to  0.000000
10/16/2010	4:53:25 PM	SiCl4 MFC set to  0.000000
10/16/2010	4:53:25 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	4:53:25 PM	Tube furnace set to 0
10/16/2010	4:54:25 PM	Helium valve closed
10/16/2010	4:54:25 PM	H2 valve closed
10/16/2010	4:54:25 PM	BCl3 valve closed
10/16/2010	4:54:25 PM	PH3 valve closed
10/16/2010	4:54:25 PM	SiCl4 pre valve closed
10/16/2010	4:54:25 PM	SiCl4 post valve closed
10/16/2010	4:54:25 PM	Bubbler valve closed
10/16/2010	4:54:25 PM	Main Vac valve opened
10/16/2010	4:54:25 PM	Bypass valve opened
10/16/2010	4:54:25 PM	Helium MFC set to  0.000000
10/16/2010	4:54:25 PM	H2 MFC set to  0.000000
10/16/2010	4:54:25 PM	BCl3 MFC set to  0.000000
10/16/2010	4:54:25 PM	PHl3 MFC set to  0.000000
10/16/2010	4:54:25 PM	SiCl4 MFC set to  0.000000
10/16/2010	4:54:25 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	4:54:25 PM	Tube furnace set to 0
10/16/2010	4:54:26 PM	Run finished at 4:54 PM
10/16/2010	4:54:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/16/2010	5:16:34 PM	Helium MFC set to  50.000000
10/16/2010	5:16:40 PM	Bypass valve closed
10/16/2010	5:16:41 PM	Main Vac valve closed
10/16/2010	5:16:44 PM	Helium valve opened
10/16/2010	5:16:54 PM	Helium MFC set to  100.000000
10/16/2010	5:17:16 PM	Helium valve closed
10/16/2010	5:17:17 PM	Bypass valve opened
10/16/2010	5:17:17 PM	Main Vac valve opened
10/16/2010	5:17:38 PM	Bypass valve closed
10/16/2010	5:17:39 PM	Main Vac valve closed
10/16/2010	5:17:41 PM	Helium valve opened
10/16/2010	5:18:26 PM	Helium MFC set to  0.000000
10/16/2010	5:18:27 PM	Helium valve closed
10/16/2010	5:18:30 PM	Bypass valve opened
10/16/2010	5:18:30 PM	Main Vac valve opened
10/16/2010	5:20:16 PM	Bypass valve closed
10/16/2010	5:20:17 PM	Main Vac valve closed
10/16/2010	5:20:30 PM	Main Vac valve opened
10/16/2010	5:20:32 PM	Bypass valve opened
10/16/2010	5:21:46 PM	Recipe started at 5:21 PM
10/16/2010	5:21:46 PM	Helium valve closed
10/16/2010	5:21:46 PM	BCl3 valve closed
10/16/2010	5:21:46 PM	PH3 valve closed
10/16/2010	5:21:46 PM	SiCl4 pre valve closed
10/16/2010	5:21:46 PM	SiCl4 post valve closed
10/16/2010	5:21:46 PM	Main Vac valve closed
10/16/2010	5:21:46 PM	Bypass valve closed
10/16/2010	5:21:46 PM	Bubbler valve closed
10/16/2010	5:21:46 PM	H2 valve opened
10/16/2010	5:21:46 PM	Helium MFC set to  0.000000
10/16/2010	5:21:46 PM	H2 MFC set to  500.000000
10/16/2010	5:21:46 PM	BCl3 MFC set to  0.000000
10/16/2010	5:21:46 PM	PHl3 MFC set to  0.000000
10/16/2010	5:21:46 PM	SiCl4 MFC set to  0.000000
10/16/2010	5:21:46 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	5:21:46 PM	Tube furnace set to 0
10/16/2010	5:23:04 PM	Helium valve closed
10/16/2010	5:23:04 PM	BCl3 valve closed
10/16/2010	5:23:04 PM	PH3 valve closed
10/16/2010	5:23:04 PM	SiCl4 pre valve closed
10/16/2010	5:23:04 PM	SiCl4 post valve closed
10/16/2010	5:23:04 PM	Main Vac valve closed
10/16/2010	5:23:04 PM	Bypass valve closed
10/16/2010	5:23:04 PM	H2 valve opened
10/16/2010	5:23:04 PM	Bubbler valve opened
10/16/2010	5:23:04 PM	Helium MFC set to  0.000000
10/16/2010	5:23:04 PM	H2 MFC set to  500.000000
10/16/2010	5:23:04 PM	BCl3 MFC set to  0.000000
10/16/2010	5:23:04 PM	PHl3 MFC set to  0.000000
10/16/2010	5:23:04 PM	SiCl4 MFC set to  0.000000
10/16/2010	5:23:04 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	5:23:05 PM	Tube furnace set to 1000
10/16/2010	5:43:04 PM	Helium valve closed
10/16/2010	5:43:04 PM	BCl3 valve closed
10/16/2010	5:43:04 PM	Main Vac valve closed
10/16/2010	5:43:04 PM	Bypass valve closed
10/16/2010	5:43:04 PM	H2 valve opened
10/16/2010	5:43:04 PM	PH3 valve opened
10/16/2010	5:43:04 PM	SiCl4 pre valve opened
10/16/2010	5:43:04 PM	SiCl4 post valve opened
10/16/2010	5:43:04 PM	Bubbler valve opened
10/16/2010	5:43:04 PM	Helium MFC set to  0.000000
10/16/2010	5:43:04 PM	H2 MFC set to  500.000000
10/16/2010	5:43:04 PM	BCl3 MFC set to  0.000000
10/16/2010	5:43:04 PM	PHl3 MFC set to  1.000000
10/16/2010	5:43:05 PM	SiCl4 MFC set to  50.000000
10/16/2010	5:43:05 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	5:43:05 PM	Tube furnace set to 1000
10/16/2010	6:03:05 PM	H2 valve closed
10/16/2010	6:03:05 PM	BCl3 valve closed
10/16/2010	6:03:05 PM	PH3 valve closed
10/16/2010	6:03:05 PM	SiCl4 pre valve closed
10/16/2010	6:03:05 PM	SiCl4 post valve closed
10/16/2010	6:03:05 PM	Main Vac valve closed
10/16/2010	6:03:05 PM	Bypass valve closed
10/16/2010	6:03:05 PM	Helium valve opened
10/16/2010	6:03:05 PM	Bubbler valve opened
10/16/2010	6:03:05 PM	Helium MFC set to  500.000000
10/16/2010	6:03:05 PM	H2 MFC set to  0.000000
10/16/2010	6:03:05 PM	BCl3 MFC set to  0.000000
10/16/2010	6:03:05 PM	PHl3 MFC set to  0.000000
10/16/2010	6:03:05 PM	SiCl4 MFC set to  0.000000
10/16/2010	6:03:05 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	6:03:05 PM	Tube furnace set to 0
10/16/2010	6:23:05 PM	Helium valve closed
10/16/2010	6:23:05 PM	H2 valve closed
10/16/2010	6:23:05 PM	BCl3 valve closed
10/16/2010	6:23:05 PM	PH3 valve closed
10/16/2010	6:23:05 PM	SiCl4 pre valve closed
10/16/2010	6:23:05 PM	SiCl4 post valve closed
10/16/2010	6:23:05 PM	Main Vac valve closed
10/16/2010	6:23:05 PM	Bypass valve closed
10/16/2010	6:23:05 PM	Bubbler valve closed
10/16/2010	6:23:05 PM	Helium MFC set to  0.000000
10/16/2010	6:23:05 PM	H2 MFC set to  0.000000
10/16/2010	6:23:05 PM	BCl3 MFC set to  0.000000
10/16/2010	6:23:05 PM	PHl3 MFC set to  0.000000
10/16/2010	6:23:05 PM	SiCl4 MFC set to  0.000000
10/16/2010	6:23:05 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	6:23:05 PM	Tube furnace set to 0
10/16/2010	6:23:05 PM	Run finished at 6:23 PM
10/16/2010	6:41:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/16/2010	6:41:55 PM	Recipe started at 6:41 PM
10/16/2010	6:41:55 PM	Helium valve closed
10/16/2010	6:41:55 PM	H2 valve closed
10/16/2010	6:41:55 PM	BCl3 valve closed
10/16/2010	6:41:55 PM	PH3 valve closed
10/16/2010	6:41:55 PM	SiCl4 pre valve closed
10/16/2010	6:41:55 PM	SiCl4 post valve closed
10/16/2010	6:41:55 PM	Main Vac valve closed
10/16/2010	6:41:55 PM	Bubbler valve closed
10/16/2010	6:41:55 PM	Bypass valve opened
10/16/2010	6:41:55 PM	Helium MFC set to  0.000000
10/16/2010	6:41:55 PM	H2 MFC set to  0.000000
10/16/2010	6:41:55 PM	BCl3 MFC set to  0.000000
10/16/2010	6:41:55 PM	PHl3 MFC set to  0.000000
10/16/2010	6:41:55 PM	SiCl4 MFC set to  0.000000
10/16/2010	6:41:55 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	6:41:55 PM	Tube furnace set to 0
10/16/2010	6:42:44 PM	Helium valve closed
10/16/2010	6:42:44 PM	H2 valve closed
10/16/2010	6:42:44 PM	BCl3 valve closed
10/16/2010	6:42:44 PM	PH3 valve closed
10/16/2010	6:42:44 PM	SiCl4 pre valve closed
10/16/2010	6:42:44 PM	SiCl4 post valve closed
10/16/2010	6:42:44 PM	Bubbler valve closed
10/16/2010	6:42:44 PM	Main Vac valve opened
10/16/2010	6:42:44 PM	Bypass valve opened
10/16/2010	6:42:44 PM	Helium MFC set to  0.000000
10/16/2010	6:42:44 PM	H2 MFC set to  0.000000
10/16/2010	6:42:44 PM	BCl3 MFC set to  0.000000
10/16/2010	6:42:44 PM	PHl3 MFC set to  0.000000
10/16/2010	6:42:44 PM	SiCl4 MFC set to  0.000000
10/16/2010	6:42:44 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	6:42:44 PM	Tube furnace set to 0
10/16/2010	6:42:45 PM	Run finished at 6:42 PM
10/16/2010	6:42:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/16/2010	6:43:20 PM	Bypass valve closed
10/16/2010	6:43:21 PM	Main Vac valve closed
10/16/2010	6:43:46 PM	Main Vac valve opened
10/16/2010	6:43:46 PM	Bypass valve opened
10/16/2010	6:43:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/16/2010	6:44:02 PM	Recipe started at 6:43 PM
10/16/2010	6:44:02 PM	Helium valve closed
10/16/2010	6:44:02 PM	H2 valve closed
10/16/2010	6:44:02 PM	BCl3 valve closed
10/16/2010	6:44:02 PM	PH3 valve closed
10/16/2010	6:44:02 PM	SiCl4 pre valve closed
10/16/2010	6:44:02 PM	SiCl4 post valve closed
10/16/2010	6:44:02 PM	Main Vac valve closed
10/16/2010	6:44:02 PM	Bubbler valve closed
10/16/2010	6:44:02 PM	Bypass valve opened
10/16/2010	6:44:02 PM	Helium MFC set to  0.000000
10/16/2010	6:44:02 PM	H2 MFC set to  0.000000
10/16/2010	6:44:02 PM	BCl3 MFC set to  0.000000
10/16/2010	6:44:02 PM	PHl3 MFC set to  0.000000
10/16/2010	6:44:02 PM	SiCl4 MFC set to  0.000000
10/16/2010	6:44:02 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	6:44:02 PM	Tube furnace set to 0
10/16/2010	6:44:03 PM	Helium valve closed
10/16/2010	6:44:03 PM	H2 valve closed
10/16/2010	6:44:03 PM	BCl3 valve closed
10/16/2010	6:44:03 PM	PH3 valve closed
10/16/2010	6:44:03 PM	SiCl4 pre valve closed
10/16/2010	6:44:03 PM	SiCl4 post valve closed
10/16/2010	6:44:03 PM	Bubbler valve closed
10/16/2010	6:44:03 PM	Main Vac valve opened
10/16/2010	6:44:03 PM	Bypass valve opened
10/16/2010	6:44:03 PM	Helium MFC set to  0.000000
10/16/2010	6:44:03 PM	H2 MFC set to  0.000000
10/16/2010	6:44:03 PM	BCl3 MFC set to  0.000000
10/16/2010	6:44:03 PM	PHl3 MFC set to  0.000000
10/16/2010	6:44:03 PM	SiCl4 MFC set to  0.000000
10/16/2010	6:44:03 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	6:44:03 PM	Tube furnace set to 0
10/16/2010	6:45:03 PM	H2 valve closed
10/16/2010	6:45:03 PM	BCl3 valve closed
10/16/2010	6:45:03 PM	PH3 valve closed
10/16/2010	6:45:03 PM	SiCl4 pre valve closed
10/16/2010	6:45:03 PM	SiCl4 post valve closed
10/16/2010	6:45:03 PM	Bubbler valve closed
10/16/2010	6:45:03 PM	Helium valve opened
10/16/2010	6:45:03 PM	Main Vac valve opened
10/16/2010	6:45:03 PM	Bypass valve opened
10/16/2010	6:45:03 PM	Helium MFC set to  100.000000
10/16/2010	6:45:03 PM	H2 MFC set to  0.000000
10/16/2010	6:45:03 PM	BCl3 MFC set to  0.000000
10/16/2010	6:45:03 PM	PHl3 MFC set to  0.000000
10/16/2010	6:45:03 PM	SiCl4 MFC set to  0.000000
10/16/2010	6:45:03 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	6:45:03 PM	Tube furnace set to 0
10/16/2010	6:46:03 PM	Helium valve closed
10/16/2010	6:46:03 PM	H2 valve closed
10/16/2010	6:46:03 PM	BCl3 valve closed
10/16/2010	6:46:03 PM	PH3 valve closed
10/16/2010	6:46:03 PM	SiCl4 pre valve closed
10/16/2010	6:46:03 PM	SiCl4 post valve closed
10/16/2010	6:46:03 PM	Bubbler valve closed
10/16/2010	6:46:03 PM	Main Vac valve opened
10/16/2010	6:46:03 PM	Bypass valve opened
10/16/2010	6:46:03 PM	Helium MFC set to  0.000000
10/16/2010	6:46:03 PM	H2 MFC set to  0.000000
10/16/2010	6:46:03 PM	BCl3 MFC set to  0.000000
10/16/2010	6:46:03 PM	PHl3 MFC set to  0.000000
10/16/2010	6:46:03 PM	SiCl4 MFC set to  0.000000
10/16/2010	6:46:03 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	6:46:03 PM	Tube furnace set to 0
10/16/2010	6:47:03 PM	H2 valve closed
10/16/2010	6:47:03 PM	BCl3 valve closed
10/16/2010	6:47:03 PM	PH3 valve closed
10/16/2010	6:47:03 PM	SiCl4 pre valve closed
10/16/2010	6:47:03 PM	SiCl4 post valve closed
10/16/2010	6:47:03 PM	Bubbler valve closed
10/16/2010	6:47:03 PM	Helium valve opened
10/16/2010	6:47:03 PM	Main Vac valve opened
10/16/2010	6:47:03 PM	Bypass valve opened
10/16/2010	6:47:03 PM	Helium MFC set to  100.000000
10/16/2010	6:47:03 PM	H2 MFC set to  0.000000
10/16/2010	6:47:03 PM	BCl3 MFC set to  0.000000
10/16/2010	6:47:03 PM	PHl3 MFC set to  0.000000
10/16/2010	6:47:03 PM	SiCl4 MFC set to  0.000000
10/16/2010	6:47:03 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	6:47:03 PM	Tube furnace set to 0
10/16/2010	6:48:03 PM	Helium valve closed
10/16/2010	6:48:03 PM	H2 valve closed
10/16/2010	6:48:03 PM	BCl3 valve closed
10/16/2010	6:48:03 PM	PH3 valve closed
10/16/2010	6:48:03 PM	SiCl4 pre valve closed
10/16/2010	6:48:03 PM	SiCl4 post valve closed
10/16/2010	6:48:03 PM	Bubbler valve closed
10/16/2010	6:48:03 PM	Main Vac valve opened
10/16/2010	6:48:03 PM	Bypass valve opened
10/16/2010	6:48:03 PM	Helium MFC set to  0.000000
10/16/2010	6:48:03 PM	H2 MFC set to  0.000000
10/16/2010	6:48:03 PM	BCl3 MFC set to  0.000000
10/16/2010	6:48:03 PM	PHl3 MFC set to  0.000000
10/16/2010	6:48:03 PM	SiCl4 MFC set to  0.000000
10/16/2010	6:48:03 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	6:48:04 PM	Tube furnace set to 0
10/16/2010	6:49:04 PM	H2 valve closed
10/16/2010	6:49:04 PM	BCl3 valve closed
10/16/2010	6:49:04 PM	PH3 valve closed
10/16/2010	6:49:04 PM	SiCl4 pre valve closed
10/16/2010	6:49:04 PM	SiCl4 post valve closed
10/16/2010	6:49:04 PM	Bubbler valve closed
10/16/2010	6:49:04 PM	Helium valve opened
10/16/2010	6:49:04 PM	Main Vac valve opened
10/16/2010	6:49:04 PM	Bypass valve opened
10/16/2010	6:49:04 PM	Helium MFC set to  100.000000
10/16/2010	6:49:04 PM	H2 MFC set to  0.000000
10/16/2010	6:49:04 PM	BCl3 MFC set to  0.000000
10/16/2010	6:49:04 PM	PHl3 MFC set to  0.000000
10/16/2010	6:49:04 PM	SiCl4 MFC set to  0.000000
10/16/2010	6:49:04 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	6:49:04 PM	Tube furnace set to 0
10/16/2010	6:50:04 PM	Helium valve closed
10/16/2010	6:50:04 PM	H2 valve closed
10/16/2010	6:50:04 PM	BCl3 valve closed
10/16/2010	6:50:04 PM	PH3 valve closed
10/16/2010	6:50:04 PM	SiCl4 pre valve closed
10/16/2010	6:50:04 PM	SiCl4 post valve closed
10/16/2010	6:50:04 PM	Bubbler valve closed
10/16/2010	6:50:04 PM	Main Vac valve opened
10/16/2010	6:50:04 PM	Bypass valve opened
10/16/2010	6:50:04 PM	Helium MFC set to  0.000000
10/16/2010	6:50:04 PM	H2 MFC set to  0.000000
10/16/2010	6:50:04 PM	BCl3 MFC set to  0.000000
10/16/2010	6:50:04 PM	PHl3 MFC set to  0.000000
10/16/2010	6:50:04 PM	SiCl4 MFC set to  0.000000
10/16/2010	6:50:04 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	6:50:04 PM	Tube furnace set to 0
10/16/2010	6:51:04 PM	H2 valve closed
10/16/2010	6:51:04 PM	BCl3 valve closed
10/16/2010	6:51:04 PM	PH3 valve closed
10/16/2010	6:51:04 PM	SiCl4 pre valve closed
10/16/2010	6:51:04 PM	SiCl4 post valve closed
10/16/2010	6:51:04 PM	Bubbler valve closed
10/16/2010	6:51:04 PM	Helium valve opened
10/16/2010	6:51:04 PM	Main Vac valve opened
10/16/2010	6:51:04 PM	Bypass valve opened
10/16/2010	6:51:04 PM	Helium MFC set to  100.000000
10/16/2010	6:51:04 PM	H2 MFC set to  0.000000
10/16/2010	6:51:04 PM	BCl3 MFC set to  0.000000
10/16/2010	6:51:04 PM	PHl3 MFC set to  0.000000
10/16/2010	6:51:04 PM	SiCl4 MFC set to  0.000000
10/16/2010	6:51:04 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	6:51:04 PM	Tube furnace set to 0
10/16/2010	6:52:04 PM	Helium valve closed
10/16/2010	6:52:04 PM	H2 valve closed
10/16/2010	6:52:04 PM	BCl3 valve closed
10/16/2010	6:52:04 PM	PH3 valve closed
10/16/2010	6:52:04 PM	SiCl4 pre valve closed
10/16/2010	6:52:04 PM	SiCl4 post valve closed
10/16/2010	6:52:04 PM	Bubbler valve closed
10/16/2010	6:52:04 PM	Main Vac valve opened
10/16/2010	6:52:04 PM	Bypass valve opened
10/16/2010	6:52:04 PM	Helium MFC set to  0.000000
10/16/2010	6:52:04 PM	H2 MFC set to  0.000000
10/16/2010	6:52:04 PM	BCl3 MFC set to  0.000000
10/16/2010	6:52:04 PM	PHl3 MFC set to  0.000000
10/16/2010	6:52:04 PM	SiCl4 MFC set to  0.000000
10/16/2010	6:52:04 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	6:52:04 PM	Tube furnace set to 0
10/16/2010	6:53:04 PM	H2 valve closed
10/16/2010	6:53:04 PM	BCl3 valve closed
10/16/2010	6:53:04 PM	PH3 valve closed
10/16/2010	6:53:04 PM	SiCl4 pre valve closed
10/16/2010	6:53:04 PM	SiCl4 post valve closed
10/16/2010	6:53:04 PM	Bubbler valve closed
10/16/2010	6:53:04 PM	Helium valve opened
10/16/2010	6:53:04 PM	Main Vac valve opened
10/16/2010	6:53:04 PM	Bypass valve opened
10/16/2010	6:53:04 PM	Helium MFC set to  100.000000
10/16/2010	6:53:04 PM	H2 MFC set to  0.000000
10/16/2010	6:53:04 PM	BCl3 MFC set to  0.000000
10/16/2010	6:53:04 PM	PHl3 MFC set to  0.000000
10/16/2010	6:53:04 PM	SiCl4 MFC set to  0.000000
10/16/2010	6:53:04 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	6:53:05 PM	Tube furnace set to 0
10/16/2010	6:54:05 PM	Helium valve closed
10/16/2010	6:54:05 PM	H2 valve closed
10/16/2010	6:54:05 PM	BCl3 valve closed
10/16/2010	6:54:05 PM	PH3 valve closed
10/16/2010	6:54:05 PM	SiCl4 pre valve closed
10/16/2010	6:54:05 PM	SiCl4 post valve closed
10/16/2010	6:54:05 PM	Bubbler valve closed
10/16/2010	6:54:05 PM	Main Vac valve opened
10/16/2010	6:54:05 PM	Bypass valve opened
10/16/2010	6:54:05 PM	Helium MFC set to  0.000000
10/16/2010	6:54:05 PM	H2 MFC set to  0.000000
10/16/2010	6:54:05 PM	BCl3 MFC set to  0.000000
10/16/2010	6:54:05 PM	PHl3 MFC set to  0.000000
10/16/2010	6:54:05 PM	SiCl4 MFC set to  0.000000
10/16/2010	6:54:05 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	6:54:05 PM	Tube furnace set to 0
10/16/2010	6:55:05 PM	H2 valve closed
10/16/2010	6:55:05 PM	BCl3 valve closed
10/16/2010	6:55:05 PM	PH3 valve closed
10/16/2010	6:55:05 PM	SiCl4 pre valve closed
10/16/2010	6:55:05 PM	SiCl4 post valve closed
10/16/2010	6:55:05 PM	Bubbler valve closed
10/16/2010	6:55:05 PM	Helium valve opened
10/16/2010	6:55:05 PM	Main Vac valve opened
10/16/2010	6:55:05 PM	Bypass valve opened
10/16/2010	6:55:05 PM	Helium MFC set to  100.000000
10/16/2010	6:55:05 PM	H2 MFC set to  0.000000
10/16/2010	6:55:05 PM	BCl3 MFC set to  0.000000
10/16/2010	6:55:05 PM	PHl3 MFC set to  0.000000
10/16/2010	6:55:05 PM	SiCl4 MFC set to  0.000000
10/16/2010	6:55:05 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	6:55:05 PM	Tube furnace set to 0
10/16/2010	6:56:05 PM	Helium valve closed
10/16/2010	6:56:05 PM	H2 valve closed
10/16/2010	6:56:05 PM	BCl3 valve closed
10/16/2010	6:56:05 PM	PH3 valve closed
10/16/2010	6:56:05 PM	SiCl4 pre valve closed
10/16/2010	6:56:05 PM	SiCl4 post valve closed
10/16/2010	6:56:05 PM	Bubbler valve closed
10/16/2010	6:56:05 PM	Main Vac valve opened
10/16/2010	6:56:05 PM	Bypass valve opened
10/16/2010	6:56:05 PM	Helium MFC set to  0.000000
10/16/2010	6:56:05 PM	H2 MFC set to  0.000000
10/16/2010	6:56:05 PM	BCl3 MFC set to  0.000000
10/16/2010	6:56:05 PM	PHl3 MFC set to  0.000000
10/16/2010	6:56:05 PM	SiCl4 MFC set to  0.000000
10/16/2010	6:56:05 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	6:56:05 PM	Tube furnace set to 0
10/16/2010	6:57:05 PM	H2 valve closed
10/16/2010	6:57:05 PM	BCl3 valve closed
10/16/2010	6:57:05 PM	PH3 valve closed
10/16/2010	6:57:05 PM	SiCl4 pre valve closed
10/16/2010	6:57:05 PM	SiCl4 post valve closed
10/16/2010	6:57:05 PM	Bubbler valve closed
10/16/2010	6:57:05 PM	Helium valve opened
10/16/2010	6:57:05 PM	Main Vac valve opened
10/16/2010	6:57:05 PM	Bypass valve opened
10/16/2010	6:57:05 PM	Helium MFC set to  100.000000
10/16/2010	6:57:05 PM	H2 MFC set to  0.000000
10/16/2010	6:57:05 PM	BCl3 MFC set to  0.000000
10/16/2010	6:57:05 PM	PHl3 MFC set to  0.000000
10/16/2010	6:57:05 PM	SiCl4 MFC set to  0.000000
10/16/2010	6:57:05 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	6:57:05 PM	Tube furnace set to 0
10/16/2010	6:58:05 PM	Helium valve closed
10/16/2010	6:58:05 PM	H2 valve closed
10/16/2010	6:58:05 PM	BCl3 valve closed
10/16/2010	6:58:05 PM	PH3 valve closed
10/16/2010	6:58:05 PM	SiCl4 pre valve closed
10/16/2010	6:58:05 PM	SiCl4 post valve closed
10/16/2010	6:58:05 PM	Bubbler valve closed
10/16/2010	6:58:05 PM	Main Vac valve opened
10/16/2010	6:58:05 PM	Bypass valve opened
10/16/2010	6:58:05 PM	Helium MFC set to  0.000000
10/16/2010	6:58:05 PM	H2 MFC set to  0.000000
10/16/2010	6:58:05 PM	BCl3 MFC set to  0.000000
10/16/2010	6:58:05 PM	PHl3 MFC set to  0.000000
10/16/2010	6:58:05 PM	SiCl4 MFC set to  0.000000
10/16/2010	6:58:05 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	6:58:06 PM	Tube furnace set to 0
10/16/2010	6:59:06 PM	H2 valve closed
10/16/2010	6:59:06 PM	BCl3 valve closed
10/16/2010	6:59:06 PM	PH3 valve closed
10/16/2010	6:59:06 PM	SiCl4 pre valve closed
10/16/2010	6:59:06 PM	SiCl4 post valve closed
10/16/2010	6:59:06 PM	Bubbler valve closed
10/16/2010	6:59:06 PM	Helium valve opened
10/16/2010	6:59:06 PM	Main Vac valve opened
10/16/2010	6:59:06 PM	Bypass valve opened
10/16/2010	6:59:06 PM	Helium MFC set to  100.000000
10/16/2010	6:59:06 PM	H2 MFC set to  0.000000
10/16/2010	6:59:06 PM	BCl3 MFC set to  0.000000
10/16/2010	6:59:06 PM	PHl3 MFC set to  0.000000
10/16/2010	6:59:06 PM	SiCl4 MFC set to  0.000000
10/16/2010	6:59:06 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	6:59:06 PM	Tube furnace set to 0
10/16/2010	7:00:06 PM	Helium valve closed
10/16/2010	7:00:06 PM	H2 valve closed
10/16/2010	7:00:06 PM	BCl3 valve closed
10/16/2010	7:00:06 PM	PH3 valve closed
10/16/2010	7:00:06 PM	SiCl4 pre valve closed
10/16/2010	7:00:06 PM	SiCl4 post valve closed
10/16/2010	7:00:06 PM	Bubbler valve closed
10/16/2010	7:00:06 PM	Main Vac valve opened
10/16/2010	7:00:06 PM	Bypass valve opened
10/16/2010	7:00:06 PM	Helium MFC set to  0.000000
10/16/2010	7:00:06 PM	H2 MFC set to  0.000000
10/16/2010	7:00:06 PM	BCl3 MFC set to  0.000000
10/16/2010	7:00:06 PM	PHl3 MFC set to  0.000000
10/16/2010	7:00:06 PM	SiCl4 MFC set to  0.000000
10/16/2010	7:00:06 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	7:00:06 PM	Tube furnace set to 0
10/16/2010	7:01:06 PM	H2 valve closed
10/16/2010	7:01:06 PM	BCl3 valve closed
10/16/2010	7:01:06 PM	PH3 valve closed
10/16/2010	7:01:06 PM	SiCl4 pre valve closed
10/16/2010	7:01:06 PM	SiCl4 post valve closed
10/16/2010	7:01:06 PM	Bubbler valve closed
10/16/2010	7:01:06 PM	Helium valve opened
10/16/2010	7:01:06 PM	Main Vac valve opened
10/16/2010	7:01:06 PM	Bypass valve opened
10/16/2010	7:01:06 PM	Helium MFC set to  100.000000
10/16/2010	7:01:06 PM	H2 MFC set to  0.000000
10/16/2010	7:01:06 PM	BCl3 MFC set to  0.000000
10/16/2010	7:01:06 PM	PHl3 MFC set to  0.000000
10/16/2010	7:01:06 PM	SiCl4 MFC set to  0.000000
10/16/2010	7:01:06 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	7:01:06 PM	Tube furnace set to 0
10/16/2010	7:02:06 PM	Helium valve closed
10/16/2010	7:02:06 PM	H2 valve closed
10/16/2010	7:02:06 PM	BCl3 valve closed
10/16/2010	7:02:06 PM	PH3 valve closed
10/16/2010	7:02:06 PM	SiCl4 pre valve closed
10/16/2010	7:02:06 PM	SiCl4 post valve closed
10/16/2010	7:02:06 PM	Bubbler valve closed
10/16/2010	7:02:06 PM	Main Vac valve opened
10/16/2010	7:02:06 PM	Bypass valve opened
10/16/2010	7:02:06 PM	Helium MFC set to  0.000000
10/16/2010	7:02:06 PM	H2 MFC set to  0.000000
10/16/2010	7:02:06 PM	BCl3 MFC set to  0.000000
10/16/2010	7:02:06 PM	PHl3 MFC set to  0.000000
10/16/2010	7:02:06 PM	SiCl4 MFC set to  0.000000
10/16/2010	7:02:06 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	7:02:06 PM	Tube furnace set to 0
10/16/2010	7:03:06 PM	H2 valve closed
10/16/2010	7:03:06 PM	BCl3 valve closed
10/16/2010	7:03:06 PM	PH3 valve closed
10/16/2010	7:03:06 PM	SiCl4 pre valve closed
10/16/2010	7:03:06 PM	SiCl4 post valve closed
10/16/2010	7:03:06 PM	Bubbler valve closed
10/16/2010	7:03:06 PM	Helium valve opened
10/16/2010	7:03:06 PM	Main Vac valve opened
10/16/2010	7:03:06 PM	Bypass valve opened
10/16/2010	7:03:06 PM	Helium MFC set to  100.000000
10/16/2010	7:03:06 PM	H2 MFC set to  0.000000
10/16/2010	7:03:06 PM	BCl3 MFC set to  0.000000
10/16/2010	7:03:06 PM	PHl3 MFC set to  0.000000
10/16/2010	7:03:06 PM	SiCl4 MFC set to  0.000000
10/16/2010	7:03:06 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	7:03:07 PM	Tube furnace set to 0
10/16/2010	7:04:07 PM	Helium valve closed
10/16/2010	7:04:07 PM	H2 valve closed
10/16/2010	7:04:07 PM	BCl3 valve closed
10/16/2010	7:04:07 PM	PH3 valve closed
10/16/2010	7:04:07 PM	SiCl4 pre valve closed
10/16/2010	7:04:07 PM	SiCl4 post valve closed
10/16/2010	7:04:07 PM	Bubbler valve closed
10/16/2010	7:04:07 PM	Main Vac valve opened
10/16/2010	7:04:07 PM	Bypass valve opened
10/16/2010	7:04:07 PM	Helium MFC set to  0.000000
10/16/2010	7:04:07 PM	H2 MFC set to  0.000000
10/16/2010	7:04:07 PM	BCl3 MFC set to  0.000000
10/16/2010	7:04:07 PM	PHl3 MFC set to  0.000000
10/16/2010	7:04:07 PM	SiCl4 MFC set to  0.000000
10/16/2010	7:04:07 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	7:04:07 PM	Tube furnace set to 0
10/16/2010	7:04:08 PM	Run finished at 7:04 PM
10/16/2010	7:04:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/16/2010	9:15:45 PM	Recipe started at 9:15 PM
10/16/2010	9:15:45 PM	Helium valve closed
10/16/2010	9:15:45 PM	BCl3 valve closed
10/16/2010	9:15:45 PM	PH3 valve closed
10/16/2010	9:15:45 PM	SiCl4 pre valve closed
10/16/2010	9:15:45 PM	SiCl4 post valve closed
10/16/2010	9:15:45 PM	Main Vac valve closed
10/16/2010	9:15:45 PM	Bypass valve closed
10/16/2010	9:15:45 PM	Bubbler valve closed
10/16/2010	9:15:45 PM	H2 valve opened
10/16/2010	9:15:45 PM	Helium MFC set to  0.000000
10/16/2010	9:15:45 PM	H2 MFC set to  500.000000
10/16/2010	9:15:45 PM	BCl3 MFC set to  0.000000
10/16/2010	9:15:45 PM	PHl3 MFC set to  0.000000
10/16/2010	9:15:45 PM	SiCl4 MFC set to  0.000000
10/16/2010	9:15:45 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	9:15:45 PM	Tube furnace set to 0
10/16/2010	9:17:08 PM	Helium valve closed
10/16/2010	9:17:08 PM	BCl3 valve closed
10/16/2010	9:17:08 PM	PH3 valve closed
10/16/2010	9:17:08 PM	SiCl4 pre valve closed
10/16/2010	9:17:08 PM	SiCl4 post valve closed
10/16/2010	9:17:08 PM	Main Vac valve closed
10/16/2010	9:17:08 PM	Bypass valve closed
10/16/2010	9:17:08 PM	H2 valve opened
10/16/2010	9:17:08 PM	Bubbler valve opened
10/16/2010	9:17:08 PM	Helium MFC set to  0.000000
10/16/2010	9:17:08 PM	H2 MFC set to  500.000000
10/16/2010	9:17:08 PM	BCl3 MFC set to  0.000000
10/16/2010	9:17:08 PM	PHl3 MFC set to  0.000000
10/16/2010	9:17:08 PM	SiCl4 MFC set to  0.000000
10/16/2010	9:17:08 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	9:17:08 PM	Tube furnace set to 1000
10/16/2010	9:37:08 PM	Helium valve closed
10/16/2010	9:37:08 PM	BCl3 valve closed
10/16/2010	9:37:08 PM	Main Vac valve closed
10/16/2010	9:37:08 PM	Bypass valve closed
10/16/2010	9:37:08 PM	H2 valve opened
10/16/2010	9:37:08 PM	PH3 valve opened
10/16/2010	9:37:08 PM	SiCl4 pre valve opened
10/16/2010	9:37:08 PM	SiCl4 post valve opened
10/16/2010	9:37:08 PM	Bubbler valve opened
10/16/2010	9:37:08 PM	Helium MFC set to  0.000000
10/16/2010	9:37:08 PM	H2 MFC set to  500.000000
10/16/2010	9:37:08 PM	BCl3 MFC set to  0.000000
10/16/2010	9:37:08 PM	PHl3 MFC set to  0.500000
10/16/2010	9:37:08 PM	SiCl4 MFC set to  50.000000
10/16/2010	9:37:08 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	9:37:08 PM	Tube furnace set to 1000
10/16/2010	9:57:08 PM	H2 valve closed
10/16/2010	9:57:08 PM	BCl3 valve closed
10/16/2010	9:57:08 PM	PH3 valve closed
10/16/2010	9:57:08 PM	SiCl4 pre valve closed
10/16/2010	9:57:08 PM	SiCl4 post valve closed
10/16/2010	9:57:08 PM	Main Vac valve closed
10/16/2010	9:57:08 PM	Bypass valve closed
10/16/2010	9:57:08 PM	Helium valve opened
10/16/2010	9:57:08 PM	Bubbler valve opened
10/16/2010	9:57:08 PM	Helium MFC set to  500.000000
10/16/2010	9:57:08 PM	H2 MFC set to  0.000000
10/16/2010	9:57:08 PM	BCl3 MFC set to  0.000000
10/16/2010	9:57:08 PM	PHl3 MFC set to  0.000000
10/16/2010	9:57:08 PM	SiCl4 MFC set to  0.000000
10/16/2010	9:57:08 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	9:57:08 PM	Tube furnace set to 0
10/16/2010	10:17:08 PM	Helium valve closed
10/16/2010	10:17:08 PM	H2 valve closed
10/16/2010	10:17:08 PM	BCl3 valve closed
10/16/2010	10:17:08 PM	PH3 valve closed
10/16/2010	10:17:08 PM	SiCl4 pre valve closed
10/16/2010	10:17:08 PM	SiCl4 post valve closed
10/16/2010	10:17:08 PM	Main Vac valve closed
10/16/2010	10:17:08 PM	Bypass valve closed
10/16/2010	10:17:08 PM	Bubbler valve closed
10/16/2010	10:17:08 PM	Helium MFC set to  0.000000
10/16/2010	10:17:08 PM	H2 MFC set to  0.000000
10/16/2010	10:17:08 PM	BCl3 MFC set to  0.000000
10/16/2010	10:17:08 PM	PHl3 MFC set to  0.000000
10/16/2010	10:17:08 PM	SiCl4 MFC set to  0.000000
10/16/2010	10:17:08 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	10:17:08 PM	Tube furnace set to 0
10/16/2010	10:17:09 PM	Run finished at 10:17 PM
10/16/2010	10:38:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/16/2010	10:38:21 PM	Recipe started at 10:38 PM
10/16/2010	10:38:21 PM	Helium valve closed
10/16/2010	10:38:21 PM	H2 valve closed
10/16/2010	10:38:21 PM	BCl3 valve closed
10/16/2010	10:38:21 PM	PH3 valve closed
10/16/2010	10:38:21 PM	SiCl4 pre valve closed
10/16/2010	10:38:21 PM	SiCl4 post valve closed
10/16/2010	10:38:21 PM	Main Vac valve closed
10/16/2010	10:38:21 PM	Bubbler valve closed
10/16/2010	10:38:21 PM	Bypass valve opened
10/16/2010	10:38:21 PM	Helium MFC set to  0.000000
10/16/2010	10:38:21 PM	H2 MFC set to  0.000000
10/16/2010	10:38:21 PM	BCl3 MFC set to  0.000000
10/16/2010	10:38:21 PM	PHl3 MFC set to  0.000000
10/16/2010	10:38:21 PM	SiCl4 MFC set to  0.000000
10/16/2010	10:38:21 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	10:38:21 PM	Tube furnace set to 0
10/16/2010	10:39:13 PM	Helium valve closed
10/16/2010	10:39:13 PM	H2 valve closed
10/16/2010	10:39:13 PM	BCl3 valve closed
10/16/2010	10:39:13 PM	PH3 valve closed
10/16/2010	10:39:13 PM	SiCl4 pre valve closed
10/16/2010	10:39:13 PM	SiCl4 post valve closed
10/16/2010	10:39:13 PM	Bubbler valve closed
10/16/2010	10:39:13 PM	Main Vac valve opened
10/16/2010	10:39:13 PM	Bypass valve opened
10/16/2010	10:39:13 PM	Helium MFC set to  0.000000
10/16/2010	10:39:13 PM	H2 MFC set to  0.000000
10/16/2010	10:39:13 PM	BCl3 MFC set to  0.000000
10/16/2010	10:39:13 PM	PHl3 MFC set to  0.000000
10/16/2010	10:39:13 PM	SiCl4 MFC set to  0.000000
10/16/2010	10:39:13 PM	Bypass solenoid MFC set to  0.000000
10/16/2010	10:39:13 PM	Tube furnace set to 0
10/16/2010	10:39:14 PM	Run finished at 10:39 PM
10/16/2010	10:39:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/16/2010	10:41:08 PM	Bypass valve closed
10/16/2010	10:41:08 PM	Main Vac valve closed
10/16/2010	10:41:13 PM	Main Vac valve opened
10/16/2010	10:41:16 PM	Bypass valve opened
